Micromachined Silicon Pressure Sensors
Uncompensated and
Compensated and Calibrated CPXL, CPX
CPCL, CPC Series
Sensing and Control
FEATURES
• Low Cost, Small Size
• Temperature
Compensated
• Zero and Span Calibrated
• Millivolt Output
• Differential, Gage and
Absolute Pressure
• Constant Voltage
Excitation
• High Impedance — Low
Current
TYPICAL APPLICATIONS
• Medical Applications
• Applications Requiring
Small Size
• Applications Requiring
Vacuum and Positive
Pressure Reference, or
Both
WARNING
PERSONAL INJURY
• DO NOT USE these
products as safety or
emergency stop devices or
in any other application
where failure of the product
could result in personal
injury.
Failure to comply with these
instructions could result in
death or serious injury.
The CPXL/CPX and the CPCL/CPC Series sensors integrate silicon
micromachined sensing technology, temperature compensation, and
calibration in a complete family of low cost packages. This series offers the
most cost-effective solution for design requirements.
These piezoresistive pressure sensors use micromachined silicon chips
mounted on a ceramic and protected with a plastic cap. Several tube
arrangements with nylon housings are available for various pressure
applications.
On devices of 5 psi and above, the top side of the chip is protected
against humidity by a Silgel coating. While the sensors are designed for
use with noncorrosive, nonionic pressure media, they accommodate many
gases that are used in medical applications.
The CPC Series is designed for the lowest cost and smallest profile. The
standard packages have only a plastic cap for OEM applications. The CPC
axial port option accommodates pressure measurements in tube
applications.
WARNING
MISUSE OF DOCUMENTATION
• The information presented in this product sheet is for reference only.
Do not use this document as product installation information.
• Complete installation, operation, and maintenance information is
provided in the instructions supplied with each product.
Failure to comply with these instructions could result in death or
serious injury
Micromachined Silicon Pressure Sensors
Uncompensated,
Compensated and Calibrated CPXL, CP
X
CPCL, CPC Series
2 Honeywell • Sensing and Control For application help: call 1-800-333-3282
CPXL/CPX and CPCL/CPC Electrical Specifications at 12 Vdc ±
±±
±0.01 Excitation, at 25°
°°
°C*
CPXL and CPX CPCL and CPC
Min. Typ. Max. Min. Typ. Max. Units
Excitation Voltage 3.0 12.0 16.0 3.0 12.0 16.0 Vdc
Null -120 0 +120 -1.0 0 +1.0 mV
Offset Temperature Shift
(0°C to 70°C)**
--
±0.5
--
--
--
±1.0
mV
Full Scale Temperature Shift
(0°C to 70°C)**
-- -2050
PPM/°C
--
--
--
±2
% Span
Linearity, Hysteresis Error*** -- 0.25 1.0 -- 0.25 1.0 % Span
Input Resistance 5.0 -- -- 5.0 -- -- kΩ
Output Resistance -- 3.0 -- -- 3.0 -- kΩ
Operating Temperature -25 -- +85 -25 -- +85
°C
Storage Temperature -40 -- +125 -40 -- +125
°C
Common Mode Pressure 50 50 psi
Proof Pressure 3X -- -- 3X -- -- FS
Proof Pressure CPXL/CPCL 100 100 in H2O
Burst Pressure 5X -- -- 5X -- -- FS
Weight 2 2 gram
*Note 1: All parameters are measured at 12Vdc excit ation, pres sure spec s obtained with pres sure applied to the front of the sensor.
**Note 2: Shift is relative to 25°C
***Note 3: Measured at ½ full scale rated press ure using BFSL
CPX/CPC Absolute Output at 12 Vdc ±
±±
±0.01 Excitation at 25°
°°
°C
FS Pressure CPX Output Full Scale Span, (mV) CPC Output Full Scale Span, (mV)
(psi) Min. Typ. Max. Min. Typ. Max.
5 270 420 540 57 60 63
15 405 630 810 85 90 95
30 405 630 810 85 90 95
60 453 633 813 85 90 95
100 504 708 912 95 100 105
150 -- -- -- 85 90 95
CPXL/CPX and CPCL/CPC Gage and Differential* Output at 12 Vdc ±
±±
±0.01 Excitation at 25°
°°
°C
FS Pressure CPXL and CPX Output Full Scale Span, (mV) CPCL and CPCOutput Full Scale Span, (mV)
(psi) Min. Typ. Max. Min. Typ. Max.
4 in H2O 50 68 86 23 25 27
10 in H2O 22 42 62 19 20 21
1 96 180 264 17 18 19
5 270 420 540 57 60 63
15 405 630 810 85 90 95
30 405 630 810 85 90 95
60 453 633 813 85 90 95
100 504 708 912 95 100 105
150 450 630 810 85 90 95
*Differential Common Mode pressure should not exceed 50 psi
Micromachined Silicon Pressure Sensors
Uncompensated and
Compensated and Calibrated CPXL, CP
X
CPCL, CPC Series
For application help: call 1-800-333-3282 Honeywell • Sensing and Control 3
MOUNTING DIMENSIONS (for reference only) mm/in
CPXL/CPX and CPCL/CPC Series
Equivalent Circuit Media Compatibility
1
2
3
4
P1 Port: Dry Gases Only. Media must be
compatible with epoxy based adhesive
P2 Port: Media must be compatible with nylon
housing, epoxy adhesive and silicon.
Pinout
1. -V Excitation
2. + Output Signal
3. +V Excitation
4. - Output Signal
Micromachined Silicon Pressure Sensors
Uncompensated and
Compensated and Calibrated CPXL, CPX
CPCL, CPC Series
Sensing and Control
Honeywell
11 West Spring Street
Freeport, Illinois 61032
Printed with Soy Ink
on 50% Recycled Paper
Sensing and Control
Honeywell
100 Discovery Way
Acton, MA 01720
Call 1-800-333-3282
008054-1-EN IL50 GLO 0800 Printed in USA Copyright [1997 – 2000] Honeywell International Inc. All rights reserved.
www.honeywell.com/sensing
CPX/CPC SERIES ORDER GUIDE
L - Low Pressure (in H
2
O)
No Character - Indicates Pressure (psi)
CPX - uncompensated and uncalibrated, mV
CPC - Motorola, compensated and calibrated, mV
Accu racy Grade
C - Commer cial
Series CPC L04 GBC
Pressure Reference
G - Gage
D - Differential
A - Absolute > 5 psi
Port Operation
1
B - Backside
F - Axial
T - Radial
FS - Offset Axial1
Pressure M easu rement
F
Port Option
Pressure Range
04 in H
2
0, 10 in H
2
O
01, 05, 15, 30, 60, 100,150 psi
NOTE: 1. Option available in Ported Gage Version Only
WARRANTY/REMEDY
Honeywell warrants goods of
its manufacture as being free of
defective materials and faulty
workmanship. Contact your local
sales office for warranty
information. If warranted goods
are returned to Honeywell during
the period of coverage,
Honeywell will repair or replace
without charge those items it
finds defective. The foregoing is
Buyer’s sole remedy and is in
lieu of all other warranties,
expressed or implied,
including those of
merchantability and fitness for
a particular purpose.
Specifications may change
without notice. The information
we supply is believed to be
accurate and reliable as of this
printing. However, we assume
no responsibility for its use.
While we provide application
assistance personally, through
our literature and the Honeywell
web site, it is up to the customer
to determine the suitability of the
product in the application.
Note: Not all product
combinations are released. For
additional information, please
contact the Application Center in
Acton, MA at 1-800-333-3283.
For application assistance,
current specifications, or name of
the nearest Authorized
Distributor, check the Honeywell
web site or call:
1-800-333-3282
FAX
1-978-263-0630
INTERNET
www.honeywell.com/sensing
info.sc@honeywell.com
