www.sensirion.com Version 1.2 – January 2019 1/7
Datasheet SFM3300-D
Datasheet SFM3300-AW
Digital Flow Meter for medical applications
Flow range: ± 250 slm, bidirectional
Small dead space < 10ml
Single use (-D) version
Re-use (-AW) version
Very fast update time (0.5ms)
Product Summary
The SFM3300 series is Sensirion’s digital flow meter series
designed for medical applications. It measures the flow rate
of air, oxygen and other non-aggressive gases with
superb accuracy. The special design of the flow channel
results in a very small dead space.
The SFM3300-D is the disposable single-use Version. The
re-use version SFM3300-AW withstands washing and
autoclaving procedures. It is in development stage with
specifications identical to SFM3300-D. Both versions are
extremely well suited for proximal flow measurements in
medical ventilation and other respiratory applications.
The SFM3300 series has been designed with the use by
medical professionals in mind. It features medical cones
for pneumatic connection to standard breathing circuits and
a mechanical interface for easy and reliable electrical
reconnection. The sensor element, signal processing and
digital calibration are on a single microchip assuring very
fast signal processing time, best-in-class accuracy and
superior robustness to rough handling and adverse
conditions.
The well-proven and patented CMOSens® sensor
technology is perfectly suited for high-quality mass
production and is the ideal choice for demanding and cost-
sensitive OEM applications.
Applications
Proximal Flow measurement
Expiratory flow measurement
For Ventilation & Anesthesia
Respiratory measurements
Metabolic Measurements
OEM options
A variety of custom options can be implemented for high-
volume OEM applications (custom flow rates, calibration
for other gases etc.). Contact us for more information.
Sensor chip
The SFM3300 series flow meter features a fifth-generation
silicon sensor chip. In addition to a thermal mass flow
sensor element, the chip contains an amplifier, A/D
converter, EEPROM memory, digital signal processing
circuitry, and interface. Due to seamless integration of
signal acquisition and processing on the single silicon die
significant performance and cost benefits are achieved.
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1.1 Physical specifications
1
Parameter
Condition
Value
Unit
Flow range
-250 … +250
slm2
Typical
Max 3
Accuracy4
span <100 slm
span >100 slm
offset
3 5
7 5
0.1 5
5
10
0.2
% m.v.6
% m.v.6
slm2
Noise Level4,7
span <25slm
span >25slm
offset
2.0 8
3 8
0.1 8
2.5
5
0.2
% m.v6
% m.v6
slm2
Accuracy shift for deviation from
Reference temperature 25°C
span
offset
0.4 8
0.015 8
0.5
0.02
% m.v./10˚C
% m.v./10°C
Resolution (14bit)
span
offset
0.07
0.034
% m.v. 6
slm2
Pressure drop
@ 60 slm
@ 100 slm
@ 200 slm
180 / 0.73 8
380 / 1.53 8
1400 / 5.62 8
230 / 0.93
550 / 2.21
1900 / 7.63
Pa / inH2O
Pa / inH2O
Pa / inH2O
1.2 Ambient conditions
Condition
Value
Unit
Dry gas
+10 … +50
°C
10-95% rel. hum. (non cond.)
+5 … +50
°C
Recommended to use
on-sensor heater
-20…+5
°C
10-95% rel. hum. (non cond.)
-40 … +70
°C
15°C - 35°C; 30 - 70 % rel.
hum.
storage in original packaging
3
years
absolute
0.54 – 1.1
bar
gauge
0.3
bar
1.3 Media compatibility
Parameter
Value
Calibration 9
Air
Media Compatibility
Air (non-condensing), N2, O2, other non- aggressive gases
Wetted Materials –AW version
Si, Si3N4, SiOx, Gold, Epoxy, PPSU, silicone, stainless steel
Wetted Materials –D version
Si, Si3N4, SiOx, Gold, Epoxy, MABS, silicone
1
Reference conditions are temperature = 25°C, absolute pressure = 966 mbar, horizontal flow and Vdd = 5V
2
slm: mass flow measured in liters per minute at standard conditions (T = 20 °C, p = 1013.25 mbar)
3
for "Max" no sensor measured outside of this limits will be shipped and a CpK of 1.33 is targeted
4
For accuracy, noise level or resolution the total value is the sum of offset and span values
5
This value corresponds to a CpK of 0.67 (95% of sensors within the “Typical” limit)
6
%m.v. = % measured value = % of reading
7
Noise level defined as standard deviation of individual sensor readings, measured at full sampling rate
8
Average value
9
Contact Sensirion for information about other gases, wider calibrated temperature ranges and higher storage temperatures.
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RoHS, REACH
RoHS and REACH compliant
2. Electrical Specifications
2.1 Electrical characteristics
Electrical properties
Condition
Value
Unit
Interface
I2C
Default Sensor Address
64 (h40)
Update Time
14 bit
0.5
ms
Soft Reset Time
80
ms
Start-up Time 10
Max.
100
ms
Supply Voltage
5V±5%
V
Communication Level
High
Low
Min.
Max.
V
2.5
GND
VDD
1.1
Power Consumption11
< 50
mW
Electrical Connector
See section 2.2 and 3.2
External Heater Power Rating
Max.
0.5
W
External Heater Resistance
Typ.
51
Ω
Output signal resolution12
14
bit
Scale Factor Flow
Air, N2
120
1/slm
Offset Flow
32768
2.2 Pad layout
2.3 Conversion to Physical Values
In order to obtain the measured flow in [slm], the measured
value needs to be converted using the following formula:
𝑓𝑙𝑜𝑤 [slm] = 𝑚𝑒𝑎𝑠𝑢𝑟𝑒𝑑 𝑣𝑎𝑙𝑢𝑒 − 𝑜𝑓𝑓𝑠𝑒𝑡 𝑓𝑙𝑜𝑤
𝑠𝑐𝑎𝑙𝑒 𝑓𝑎𝑐𝑡𝑜𝑟 𝑓𝑙𝑜𝑤
Please note that the first measurement performed directly
after chip initialization is not valid.
10
After 4.75V is reached
11
When the heater resistor on the PCB is not in operation
12
16 bit with two least significant bits always zero
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3. Mechanical Specifications
All dimensions are in millimeters (mm).
3.1 Mechanical fitting
Fittings of the SFM3300 series sensors correspond to the
international standard ISO5356-1:2004. Details about this
type of connection can be found in the description of the
standard.
3.2 Mechanical / Electrical Interface
SFM3300 series sensors have been designed for use in an
proximal/expiratory environment. Therefore the sensor
connector has been designed for an easy and reliable
connection and disconnection. The connector itself is not
provided as a standard product by Sensirion but Sensirion
can help with an application note including design
recommendations.
Dimension
Condition
Value
Unit
Length
69.3
mm
Diameter Flow channel
11.25
mm
Proximal medical cone
Inner
15
mm
Proximal medical socket
Outer
22
mm
Distal medical socket
Inner
22
mm
Distal medical cone
Outer
15
mm
Dead space
<10
ml
Weight
<20
g
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4. Instructions for Use
4.1 Calibration orientation
The sensors are calibrated horizontally as depicted in the
following graph:
Positive flow direction is from the female 22 mm cone to the
male 22 mm medical cone, so that inspiratory flows are
positive and expiratory flows negative.
4.2 Inlet flow conditions
In order to provide good flow conditions, the inner diameter
of the connecting tube has to be approximately the same as
the inner diameter of the SFM3300 main flow channel. The
SFM3300-AW is equipped with meshes on the in- and
outlets of the flow channel to reduce turbulences and thus
improve the stability. In contrast the SFM3300-D has been
designed without meshes as stability after re-use is not
needed for a single use sensor.
4.3 Temperature compensation
The SFM3300 series sensors feature digital temperature
compensation. The temperature is measured on the
CMOSens® chip by an on-chip temperature sensor. This
data is fed to a compensation circuit that is also integrated
on the CMOSens® sensor chip. Thus, no external
temperature compensation is necessary.
4.4 Reprocessing (applies only to SFM3300-AW
version)
The SFM3300-AW has been designed to withstand medical
cleaning procedures. For details of the test and the results
contact Sensirion.
Sensirion AG does not guarantee the stability of the flow
sensor using arbitrary methods and/or equipment for
autoclaving. Validation of the flow sensor stability for a
specific type of procedure and/or equipment is the sole
responsibility of the customer.
4.5 ESD
The electronics of the SFM3300 flow sensor chip has been
tested for ESD and passed an 8kV contact test. For ESD
information about the additional EEPROM available on the
SFM3300-AW version (type: 24LC01BT-I/MC) please
consult the datasheet of the EEPROM.
4.6 Sensor handling
The SFM3300 series sensors have been designed to be
robust and shock resistant. Nevertheless, the accuracy of
the high-precision SFM3300 sensors can be degraded by
rough handling. Sensirion does not guarantee proper
operation in case of improper handling.
Note: never connect the sensor while connecting part is wet.
Especially after cleaning procedure special care is needed
to dry the sensor.
Please be aware that SFM3300 has been designed for
usage with air and other non-corrosive and non-toxic gases.
If leak tightness is critical in customer application it remains
customer’s sole responsibility to leak-test the sensor before
usage.
4.7 I2C Interface and communication
Due to I2C interface restrictions, the cable length from the
sensor to the microprocessor is recommended to be as
short as possible and certainly not above 30 cm. For wires
longer than 10 cm it is mandatory to shield the SDA and
SCL.
In case data is read from the sensor, the first data byte of
the transaction must always be acknowledged by the
master.
It must be possible to reset the sensor through a hard reset,
i.e. powering off and on the sensor, in case the sensor
freezes.
I2C Communication details are given in the application note
“GF_AN_SFM3xxx_I2C Functional Description”.
SFM3300-AW only:
There is an additional EEPROM on the SFM3300-AW to
allow storage of customer-specific data (like for example
usage hours). Please see all details in the datasheet of the
EEPROM. The EEPROM is of type 24LC01BT-I/MC. No
additional validation or modification of EEPROM settings
has been performed by Sensirion.
Positive flow direction
(also marked on the sensor body)
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5. Ordering Information
Use the part names and product numbers shown in the
table below when ordering SFM3300 series sensors. For
the latest product information and local distributors, visit
www.sensirion.com.
Part name
Product Number
SFM3300-250-AW
1-101052-01
SFM3300-250-D
1-101053-01
Packaging units: 30 items/tray.
Every sensor is traceable by a unique Serial Number.
Revision history
Date
Author
Version
Changes
July 2017
SAW
1.0
Release SFM3300-D
Sep 2018
DAT
1.1
Added shelf life for SFM3300-D version on page 2; Removed rev history before version 1.0;
January 2019
DAT
1.2
Fully released also –AW version
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Important Notices
Warning, personal injury
Do not use this product as safety or emergency stop devices or in
any other application where failure of the product could result in
personal injury (including death). Do not use this product for
applications other than its intended and authorized use. Before
installing, handling, using or servicing this product, please consult
the datasheet and application notes. Failure to comply with these
instructions could result in death or serious injury.
If the Buyer shall purchase or use SENSIRION products for any
unintended or unauthorized application, Buyer shall defend, indemnify
and hold harmless SENSIRION and its officers, employees, subsidiaries,
affiliates and distributors against all claims, costs, damages and
expenses, and reasonable attorney fees arising out of, directly or
indirectly, any claim of personal injury or death associated with such
unintended or unauthorized use, even if SENSIRION shall be allegedly
negligent with respect to the design or the manufacture of the product.
ESD Precautions
The inherent design of this component causes it to be sensitive to
electrostatic discharge (ESD). To prevent ESD-induced damage and/or
degradation, take customary and statutory ESD precautions when
handling this product.
Warranty
SENSIRION warrants solely to the original purchaser of this product for
a period of 12 months (one year) from the date of delivery that this
product shall be of the quality, material and workmanship defined in
SENSIRION’s published specifications of the product. Within such period,
if proven to be defective, SENSIRION shall repair and/or replace this
product, in SENSIRION’s discretion, free of charge to the Buyer,
provided that:
notice in writing describing the defects shall be given to SENSIRION
within fourteen (14) days after their appearance;
such defects shall be found, to SENSIRION’s reasonable
satisfaction, to have arisen from SENSIRION’s faulty design,
material, or workmanship;
the defective product shall be returned to SENSIRION’s factory at
the Buyer’s expense; and
the warranty period for any repaired or replaced product shall be
limited to the unexpired portion of the original period.
This warranty does not apply to any equipment which has not been
installed and used within the specifications recommended by
SENSIRION for the intended and proper use of the equipment. EXCEPT
FOR THE WARRANTIES EXPRESSLY SET FORTH HEREIN,
SENSIRION MAKES NO WARRANTIES, EITHER EXPRESS OR
IMPLIED, WITH RESPECT TO THE PRODUCT. ANY AND ALL
WARRANTIES, INCLUDING WITHOUT LIMITATION, WARRANTIES
OF MERCHANTABILITY OR FITNESS FOR A PARTICULAR
PURPOSE, ARE EXPRESSLY EXCLUDED AND DECLINED.
SENSIRION is only liable for defects of this product arising under the
conditions of operation provided for in the datasheet and proper use of
the goods. SENSIRION explicitly disclaims all warranties, express or
implied, for any period during which the goods are operated or stored not
in accordance with the technical specifications.
SENSIRION does not assume any liability arising out of any application
or use of any product or circuit and specifically disclaims any and all
liability, including without limitation consequential or incidental damages.
All operating parameters, including without limitation recommended
parameters, must be validated for each customer’s applications by
customer’s technical experts. Recommended parameters can and do
vary in different applications.
SENSIRION reserves the right, without further notice, (i) to change the
product specifications and/or the information in this document and (ii) to
improve reliability, functions and design of this product.
Copyright © 2001-2015, SENSIRION.
CMOSens® is a trademark of Sensirion
All rights reserved
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